YZU Pro. Guo-bin Jung receives support from the project of NSTC for NTD $ 5.9 million

The team of Professor Guo-bin Jung from the department of Mechanical Engineering of Yuan Ze University plans to adapt Proton Exchange Membrane (PEM) and a low-carbon ozone water system to innovatively apply to the wafer cleaning process replacing high-carbon ozone and reducing the use of wet chemicals. It put green semiconductor manufacturing processes into practice. It received support from the Taiwan Germination project of the National Science and Technology Council, the only one connected to the semiconductor industry among many biomedical projects.